As semiconductor manufacturing advances towards more sophisticated processes, the operating environments have become extremely demanding—high temperatures, aggressive plasmas, corrosive chemical gases, and stringent purity requirements all place near-cruel challenges on sealing materials. JST has launched the Kalfluo® series of perfluoroelastomer (FFKM) sealing solutions, dedicated to meeting the high-performance and high-reliability standards unique to leading international brands.

Why is FFKM the Unavoidable Choice for Semiconductor Sealing?

FFKM represents the highest performance tier in elastomer materials. Its fully fluorinated molecular structure grants it unparalleled properties:

• Exceptional Chemical Resistance: Withstands nearly all chemical media, including strong acids, alkalis, solvents, and various polar substances, performing exceptionally well in wet etch and cleaning processes.
• Outstanding High-Temperature Resistance: Our Kalfluo® series operates effectively from -10°C to 300°C. For instance, our Grade 8520 maintains sealing performance under long-term exposure in ultra-high temperature environments like LPCVD and epitaxial furnaces.
• Low Outgassing & Emissions: Minimizes volatile emissions under high-temperature vacuum conditions, preventing contamination of the process chamber and safeguarding the purity of thin-film deposition and wafer handling.
• Superior Plasma Erosion Resistance: Effectively resists plasma bombardment in processes like dry etching and PECVD, reducing surface issues like powdering, tracking, and cracking for extended service life.
• Low Compression Set: Maintains excellent elasticity and recovery even under prolonged heat and pressure, ensuring durable and stable sealing.
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JST Seals provides not only standard FFKM seals but also comprehensive support—from material selection, structural design, and FEA simulation to production in Class 10000 cleanrooms. We ensure every product meets the semiconductor industry's extreme demands for reliability and cleanliness.