The semiconductor industry demands precision, reliability, and contamination-free environments to ensure flawless production processes. At the heart of this mission lie specialized sealing solutions capable of withstanding extreme conditions. FFKM (Perfluoroelastomer) O-rings have emerged as the gold standard for critical applications in semiconductor manufacturing, offering unparalleled resistance to aggressive chemicals, plasma exposure, and ultra-high temperatures.

Why FFKM Outperforms Traditional Materials in Semiconductor Applications

Perfluoroelastomer (FFKM) O-rings have carbon fluorine bonds, making them one of the most thermally stable, oxidative stable, and chemically stable fluorinated polymers.

For processes such as plasma etching, chemical vapor deposition (CVD), and wafer cleaning, FFKM seals maintain integrity where other materials degrade, preventing costly particle generation or unplanned downtime.

JST developed FFKM KALFLUO® sealing products to meet the increasingly demanding sealing needs of equipment manufacturers and users in semiconductor, petrochemical, instrumentation, energy, biopharmaceutical, food and medical industries.