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Perfluoroelastomer (FFKM) O-rings have carbon fluorine bonds, making them one of the most thermally stable, oxidative stable, and chemically stable fluorinated polymers.
Brand:
JST SealsItem NO.:
KALFLUO® 9530Payment:
T/TProduct Origin:
ChinaShipping Port:
GuangzhouOrder(MOQ):
50
Perfluoroelastomers FFKM seal for Semiconductor Manufacturing
Perfluoroelastomer (FFKM) O-rings have carbon fluorine bonds, making them one of the most thermally stable, oxidative stable, and chemically stable fluorinated polymers. High reliability for dynamic and static applications, as well as stability for corrosive media. Due to the bonding between carbon and fluorine atoms, FFKM currently offers the highest operating temperature range, the widest chemical compatibility, and the lowest levels of degassing and extractability.
KALFLUO® 9530 has excellent resistance to chemical corrosion, organic acid, inorganic acid, alkali, ester, ether, ketone, aldehyde, etc. It is applicable to the food and medical industry, especially in the processing of some plasma and gas deposition in the semiconductor manufacturing process. It has extremely low weight loss in oxygen and fluorine-containing plasma, and the maximum service temperature is 270 °C.
In semiconductor applications, FFKM O-rings help prevent pollution while providing chemical resistance and thermal stability. Due to their anti expansion and anti brittleness properties, FFKM O-rings can also be utilized in chemical process applications.
Mechanical Property
|
Properties |
Unit |
Value |
Standard |
|
Hardness |
Shore A |
75 |
ASTM D2240 |
|
100% modulus
|
MPa |
7.9 |
ASTM D412，500mm/min |
|
Tensile strength |
MPa |
16.9 |
ASTM D412，500mm/min |
|
Elongationat break |
% |
196 |
ASTM D412，500mm/min |
|
Compression set 70h×204℃ |
% |
23.6 |
ASTM D395B 214-O-RING |
If you have any questions or special requirement, please contact us.
Fluid resistance overview
|
Fluid |
Volume Swelling |
|
Inorganic acids |
++++ |
|
Organic acids |
++++ |
|
Alkalis |
++++ |
|
Amines (RT) |
++++ |
|
Hot amines (> 70°C) |
+++ |
|
Water/Steam |
++++ |
|
Ketones |
++++ |
|
Esters |
++++ |
|
Ethers |
++++ |
|
Aldehydes |
++++ |
|
Alcohols |
++++ |
|
Hydrocarbons |
++++ |
|
Sour gas |
++++ |
|
Lubricants |
++++ |
|
Fluorinated fluids |
+++ |
Key to fluid resistance:
++++= excellent
+++= very good
++=good
+=bad
Application
KALFLUO® Product
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Categories
This is sealing product developed by JST to meet the increasingly demanding sealing needs of equipment manufacturers and users in semiconductor, petrochemical, mechanical seal, instrumentation, energy, biopharmaceutical, food and medical industries.
FFKM O-ring is a circular seal made of perfluoroelastomer compound, with a higher fluorine content than FKM fluoroelastomer.
Many industries use FFKM O-rings in critical applications where sealing failure is strictly prohibited. These industries include chemical processing, energy, semiconductors, pharmaceuticals, oil and gas recovery, aerospace, and other industries.
FFKM O-rings provide the highest temperature (up to 620 ° F) and most common chemical resistance among all rubber O-ring and gasket materials.
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