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Perfluoroelastomers FFKM seal for Semiconductor Manufacturing

Perfluoroelastomers FFKM seal for Semiconductor Manufacturing

Perfluoroelastomer (FFKM) O-rings have carbon fluorine bonds, making them one of the most thermally stable, oxidative stable, and chemically stable fluorinated polymers.

  • Brand:

    JST Seals
  • Item NO.:

    KALFLUO® 9530
  • Payment:

    T/T
  • Product Origin:

    China
  • Shipping Port:

    Guangzhou
  • Order(MOQ):

    50
  • Product Detail

Perfluoroelastomers FFKM seal for Semiconductor Manufacturing


Perfluoroelastomer (FFKM) O-rings have carbon fluorine bonds, making them one of the most thermally stable, oxidative stable, and chemically stable fluorinated polymers. High reliability for dynamic and static applications, as well as stability for corrosive media. Due to the bonding between carbon and fluorine atoms, FFKM currently offers the highest operating temperature range, the widest chemical compatibility, and the lowest levels of degassing and extractability.


KALFLUO® 9530 has excellent resistance to chemical corrosion, organic acid, inorganic acid, alkali, ester, ether, ketone, aldehyde, etc. It is applicable to the food and medical industry, especially in the processing of some plasma and gas deposition in the semiconductor manufacturing process. It has extremely low weight loss in oxygen and fluorine-containing plasma, and the maximum service temperature is 270 °C.


In semiconductor applications, FFKM O-rings help prevent pollution while providing chemical resistance and thermal stability. Due to their anti expansion and anti brittleness properties, FFKM O-rings can also be utilized in chemical process applications.


Mechanical Property

Properties

Unit

Value

Standard

Hardness 

Shore A

75

ASTM D2240


100% modulus


MPa
7.9

ASTM D412,500mm/min

Tensile strength

MPa

16.9

ASTM D412,500mm/min

Elongationat break

%

196

ASTM D412,500mm/min

Compression set 70h×204℃ 

%

23.6

ASTM D395B 214-O-RING

If you have any questions or special requirement, please contact us.


Fluid resistance overview

Fluid

Volume Swelling

Inorganic acids

++++

Organic acids

++++

Alkalis

++++

Amines (RT)

++++

Hot amines (> 70°C)

+++

Water/Steam

++++

Ketones

++++

Esters

++++

Ethers

++++

Aldehydes

++++

Alcohols

++++

Hydrocarbons

++++

Sour gas

++++

Lubricants

++++

Fluorinated fluids

+++

Key to fluid resistance:

++++= excellent

+++= very good

++=good

+=bad


Application

  • Mechanical seal
  • Pump
  • Valve
  • Compressor
  • Centrifuge
  • Metering and control instruments
  • Reactor
  • Mixers and Grinders
  • Analytical Instruments
  • Spraying equipment


KALFLUO® Product

  • O ring
  • AS 568A        USA Standard
  • JIS B2401      Japan Standard
  • METRIC         Metric dimension standard
  • GB3452.1      China national standard
  • Customized non-standard O-ring


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    If you are interested in our products and want to know more details,please leave a message here,we will reply you as soon as we can.

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