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What are the reasons for trying to use metal spring energized seals in semiconductor applications?

What are the reasons for trying to use metal spring energized seals in semiconductor applications?

  • August 03. 2022

The high-performance metal spring energized seal is made of high-performance polymer, which can solve the sealing challenges of rotating motion, friction resistance limitation, plane change along the sealing surface and dynamic sealing.


PTFE spring energized seals are designed for extreme low temperatures ranging from -270 ° C to extremely high temperatures, sometimes exceeding 300 ° C. The specific design can withstand extreme HTHP combination (high temperature high pressure). PTFE spring energized seals have radial design and face seal design, suitable for static and dynamic applications. PTFE spring heated seals are inert to almost all chemicals except molten alkali metals, high-temperature fluorine gas and chlorine trifluoride. Available spring materials include stainless steel such as 1.4301 and Elgiloy ®, Hastelloy ® And Inconel 718. MSE seals are widely used in aerospace, energy and life science markets because of their low integration cost, ultra-high pressure, wide operating temperature and chemical corrosion resistance.


View of a typical MSE seal configuration

Metal Spring Energized seal


For the semiconductor market, we can take advantage of chemical resistance and combine it with new spring design to provide low differential pressure seal for wet chemical applications without mold processing, because MSE is processed from optimized isostatic pressure molding blank shape.


For more information about our MSE design products, please contact JST sales representative.

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