Perfluoroether rubber (FFKM) is a high-performance sealing material, whose excellent performance has led to its application throughout the entire manufacturing system of semiconductor products. FFKM seal is one of the main consumables required for the production of integrated circuits. Main performance characteristics of FFKM: 1) Physical properties FFKM has a density of 1.9-2.0g/cm ³, Its physica...
Industrial grade FFKM seal FFKM has excellent chemical corrosion resistance and high temperature resistance characteristics, which makes FFKM widely used in various harsh working conditions for chemical applications. Semiconductor grade FFKM seal JST semiconductor-grade FFKM compounds are with high purity (low amount of extractables) and very good oxygen and CF4 plasma resistance, which have the t...
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